Mechanics of microelectromechanical system - Nicolae Lobontiu, Ephrahim Garcia - książka wyd. 2005

Opis

Mechanics of Microelectromechanical Systems (MEMS) is a specialized textbook that focuses on the mechanical behavior and principles governing Microelectromechanical Systems (MEMS). These systems combine mechanical and electrical components at the micro- and nanoscale to create devices that have applications in various fields such as sensors, actuators, medical devices, and communication systems. The book addresses the unique challenges involved in designing and analyzing MEMS, which operate in a domain where traditional mechanics needs to be adapted due to the small scale and intricate nature of the components.